Veeco and Imec Develop 300mm Process for Barium Titanate on Silicon Photonics

Veeco Instruments and imec have developed a 300mm manufacturing-compatible process for integrating barium titanate onto silicon photonics platforms using a new MBE-based cluster system. This breakthrough addresses cost and scalability challenges in producing advanced electro-optic materials needed for high-speed optical transceivers, quantum computing, LiDAR, and AR/VR applications. The collaboration introduces solid and hybrid MBE techniques that enable repeatable, lower-cost epitaxial growth of single-crystal BaTiO₃ thin films on silicon, filling a critical gap in commercial production capabilities for next-generation silicon photonics technology.